|
Rotation
accuracy |
(0.015
+3H / 10000)μm:50 upr, LSC method |
|
Straightness
accuracy
|
0.1μM
/ 100MM, 0.25μm / 500mm |
| Parallelism
accuracy |
1.5μm
/ 500mm |
| Measuring
Items: |
Polar: |
Roundness,
Flatness, Parallelism, Concentricity, Radial deviation,
Squareness, Thickness variation, Run-out, Diameter. |
| Linear: |
Squareness,
Taper, Cylindricity, Parallelism. |
|
| Rotation
accuracy |
(0.40
+ 0.0006H)μm (p-p) |
| Straightness
accuracy |
0.15μm
/ 100mm, 0.3Um / 300mm |
| Parallelism |
2μm/350mm |
| Measuring
Parameters: |
Flatness,
parallelism, coaxiality, diameter, deviation, concentricity,
squareness, run-out, roundness, cylindricity and straightness.
|
|